| 标准编号 | ISO 14644-13 |
| 标准名称 | Cleanrooms and associated controlled environments -- Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications |
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| 替换信息 | |
| 前言 | |
| 无 |
| 标准编号 | ISO 14644-13 |
| 标准名称 | Cleanrooms and associated controlled environments -- Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications |
| 主编部门 | |
| 标准状态 | |
| 出版社 | |
| 批准文号 | |
| 发布日期 | |
| 实施日期 | |
| 废止日期 | |
| 替换信息 | |
| 前言 | |
| 无 |
