| 标准编号 | ISO 16413:2013 |
| 标准名称 | Evaluation of thickness, density and interface width of thin films by X-ray reflectometry -- Instrumental requirements, alignment and positioning, data collection, data analysis and reporting |
| 主编部门 | |
| 标准状态 | |
| 出版社 | |
| 批准文号 | |
| 发布日期 | |
| 实施日期 | |
| 废止日期 | |
| 替换信息 | |
| 前言 | |
| 无 |
