| 标准编号 | ASTM F2113-01(2007) (Superseded) |
| 标准名称 | Standard Guide for Analysis and Reporting the Impurity Content and Grade of High Purity Metallic Sputtering Targets for Electronic Thin Film Applications |
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| 发布日期 | 2007-06-01 |
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| 前言 | |
| 无 |
