| 标准编号 | ASTM F374-00a (Superseded) |
| 标准名称 | Standard Test Method for Sheet Resistance of Silicon Epitaxial, Diffused, Polysilicon, and Ion-implanted Layers Using an In-Line Four-Point Probe with the Single-Configuration Procedure |
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| 发布日期 | 2000-12-10 |
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| 无 |