| 标准编号 | ASTM F388-84 (Withdrawn) |
| 标准名称 | Method for Measurement of Oxide Thickness on Silicon Wafers and Metallization Thickness by Multiple-Beam Interference (Tolansky Method) |
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| 标准编号 | ASTM F388-84 (Withdrawn) |
| 标准名称 | Method for Measurement of Oxide Thickness on Silicon Wafers and Metallization Thickness by Multiple-Beam Interference (Tolansky Method) |
| 主编部门 | |
| 标准状态 | |
| 出版社 | |
| 批准文号 | |
| 发布日期 | |
| 实施日期 | |
| 废止日期 | |
| 替换信息 | |
| 前言 | |
| 无 |
