| 标准编号 | DIN 50441-5 (2001-04) (Withdrawn) |
| 标准名称 | Testing Of Materials For Semiconductor Technology - Determination Of The Geometric Dimensions Of Semiconductor Wafers - Part 5: Terms Of Shape And Flatness Deviation |
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| 发布日期 | 2001-04-01 |
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| 前言 | |
| 无 |
