| 标准编号 | ASTM F2113-01e1 (Superseded) |
| 标准名称 | Standard Guide for Analysis and Reporting the Impurity Content and Grade of High Purity Metallic Sputtering Targets for Electronic Thin Film Applications |
| 主编部门 | |
| 标准状态 | |
| 出版社 | |
| 批准文号 | |
| 发布日期 | 2001-06-10 |
| 实施日期 | |
| 废止日期 | |
| 替换信息 | |
| 前言 | |
| 无 |
| 标准编号 | ASTM F2113-01e1 (Superseded) |
| 标准名称 | Standard Guide for Analysis and Reporting the Impurity Content and Grade of High Purity Metallic Sputtering Targets for Electronic Thin Film Applications |
| 主编部门 | |
| 标准状态 | |
| 出版社 | |
| 批准文号 | |
| 发布日期 | 2001-06-10 |
| 实施日期 | |
| 废止日期 | |
| 替换信息 | |
| 前言 | |
| 无 |
